CAS号:12033-62-4
品名:氮化钽azanylidynetantalum
中文别名:氮化钽
英文别名:Tantalummononitride;nitridotantalum;Tantalumnitride;Tantalumnitride(TaN);
分子式:NTa
分子量:194.955
精确质量:194.951
Psa:23.79
EINECS号:234-788-4
MDL号:MFCD00049568
PubChem号:24860112
密度:
熔点:3360°C
WGK Germany:3
简介:Tantalumnitride(TaN)isaninorganicchemicalcompound.Itissometimesusedtocreatebarrieror\"glue\"layersbetweencopper,orotherconductivemetals,anddielectricinsulatorfilmssuchasthermaloxides.Thesefilmsaredepositedontopofsiliconwafersduringthemanufactureofintegratedcircuits,tocreatethinfilmsurfacemountresistorsandhasotherelectronicapplications.
用途:1.用来制造精确片状电阻的材料,氮化钽电阻则可抵抗水汽的侵蚀。用作超硬质材料添加剂,可制备纯的五氯化钽:用于喷涂,增加变压器、集成线路、二极管的电稳定性。
陶瓷